Customization: | Available |
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Inherent Frequency: | 1-2Hz, Vertically; 1-1.5 Hz, Horizontally |
Vibration Isolation Structure: | Compound Rubber Pads and Hollow Cone Rubber Struct |
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Inherent Frequency | Vertical:1.0~2.0Hz Horizontal:1.0~1.5Hz |
Isolating mode: | Air spring and bulb self-centering pendulum-bar |
leveling: | Self-leveling and auto control |
Damping Mode | Air damping holes |
Height | 800mm |
Working pressure | 0.2~0.4MPa |
Air source | Silent Compressor <50dB |
Amplitude | <1μm |
Repeating Accuracy | ±0.1mm |
Surface Plate Flatness | ≤0.05mm/m² |
Roughness | ≤0.8μm,Matt finishing |